CF4
Formula: CF4
CAS No.: 75-73-0
EINECS No.: 200-896-5
UN No.: UN1982
Purity: 99.99%-99.999%
Dot Class:2.2 non-combustible gas
Appearance: Colorless And Odorless
Tetrafluoromethane, also known as carbon tetrafluoride or R-14, is the simplest perfluorocarbon. As its IUPAC name indicates, tetrafluoromethane is the perfluorinated counterpart to the hydrocarbon methane. It can also be classified as a haloalkane or halomethane.
Combined with oxygen to etch polysilicon, silicon dioxide, silicon nitrite, some metals and metal silicides
Can be combined with halocarbon 116 or used alone to clean wafers and chambers
Wafer etch processes
Low-temperature refrigerant (R-14)
Expansion agent for polyolefins and polyurethanes
Electronics microfabrication
Propellant for aerosols
Fire extinguishing agent
Gaseous dielectric insulating medium
Neutron detector
| Project | Index | |
| Tetrafluoromethane (CF4) | 99.999% Min | >99.999% |
| Oxygen(O2) | <1.0 | <0.2 |
| Nitrogen(N2) | <1.0 | <0.6 |
| Carbon Monoxide(CO) | <0.5 | <0.2 |
| Carbon Dioxide(CO2) | <0.5 | <0.2 |
| Sulfur Hexafluoride(SF6) | <0.2 | <0.1 |
| Trifluoromethane(CHF3) | <0.5 | <0.1 |
| Other Halocarbon(OFC)* | <1.0 | <0.7 |
| Total Hydrocarbon(THC)* | <0.5 | <0.1 |
| Moisture(H2O) | <0.5 | <0.2 |
| Acidity(as HF) | <0.1 | <0.08 |
| Total Contents Of Impurity | ≤10.0 | <10.0 |
| Particale(>0.1μm) | <10.0 | <1.0 |
| CYLINDER SIZE | FILL WEIGHT (LB) |
| 440L/Y-Ton | 700 |
| 49L/Size 300 | 72 |
| 44L/Size 200 | 70 |
| 16L/Size 80 | 25 |
| 7L/Size 35 | 11 |
Address: No. 90 Huadong Road, High tech Zone, Qingdao City, Shandong Province, China
E-mail: sainsgas@sainsgas.com
Tel: 18563963366
Copyright © 2024 Qingdao SAINS Gas Technology Co., Ltd. All Rights Reserved. Powered by HiCheng
