NH3-Ammonia

Product Details

Ammonia is an inorganic chemical compound of nitrogen and hydrogen with the formula NH₃. A stable binary hydride and the simplest pnictogen hydride, ammonia is a colourless gas with a distinctive pungent smell.    


Application:

1.Used in the CVD (Chemical Vapor Deposition) process for Semiconductor and advanced materials manufacturing.
2.Used by the automotive and aeronatics industries as a heat treatment.
3.Used in calibration gas mixtures for petrochemical industry, environmental emissions monitoring, industrial hygiene monitors and trace impurity analyzers,etc.    


Technical Information


GRADE 5GRADE 5.5GRADE 6.4
Purity100.00%100.00%100.00%
Nitrogen< 5 ppmv< 1.5 ppmv
Oxygen
< 0.5 ppmv(+Ar): <100 ppbv
Carbon Monoxide< 2 ppmv< 0.1 ppmv< 50 ppbv
Carbon Dioxide
< 0.4 ppmv< 100 ppbv
Hydrogen

< 100 ppbv
Methane< 2 ppmv< 0.1 ppmv< 50 ppbv
Water(+O2): < 5 ppmv< 2 ppmv< 200 ppbv


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