NF3-Nitrogen Trifluoride

Formula: NF3

CAS No.: 7783-54-2

EINECS No.: 232-007-1

UN No.: UN2451

Purity: 99%-100%

Dot Class: 2.3 Toxic gases

Appearance: Colorless with a slightly musty odor

Product Details

Nitrogen trifluoride is the inorganic compound with the formula. It is a colorless, non-flammable, toxic gas with a slightly musty odor. In contrast with ammonia, it is nonbasic. It finds increasing use within the manufacturing of flat-panel displays, photovoltaics, LEDs and other microelectronics.

Application:

Used as an etchant in microelectronics
Used as key chemical agent used to manufacture certain types of photovoltaic cells for solar panels,etc.

Technical Information

	GRADE 2.7	GRADE 4	GRADE 4.5
Purity	99.70%	99.99%	100.00%
Oxygen		< 10 ppmv	< 5 pmmv
Oxygen and Argon	< 700 ppmv
Nitrogen	< 700 ppmv	< 10 ppmv	< 5 ppmv
Carbon Dioxide	< 25 ppmv	< 10 ppmv	< 3 ppmv
Carbon Monoxide	< 25 ppmv		< 0.5 ppmv
Water	< 1 ppmv	< 1 ppmv	< 1 ppmv
Carbon Tetrafluoride	< 1,500 ppmv	< 40 ppmv	< 25 ppmv
Nitrous Oxide	< 50 ppmv	< 10 ppmv	< 2 ppmv
Acidity (HF)	< 1 ppmv	< 5 ppmv	< 1 ppmv
Sulfur Hexafluoride	< 50 ppmv		< 1 ppmv

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NF3-Nitrogen Trifluoride

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